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VAPBOX 500
VAPBOX 500
Innovative, low cost, compact, non contact, flash DLI Vaporizer for solid and liquid precursors used in CVD, ALD and all gas phase processes with one liquid inlet.
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VAPBOX 300
VAPBOX 300
DLI (Direct Liquid Injection) CVD/ALD vaporizer
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Purifier
Purifier
NANOCHEM purifiers offer the highest lifetimes and the best impurity removal efficiencies in a very economical design.
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SPA
SPA
As the component installed inside the steamer, it purifies the general water vapor made from DI water into the ultra pure water vapor.
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Rainmaker
Rainmaker
It is the component which purifies the DI water into ultra high purity water vapor and mixes it with carrier gas. It is installed inside the rainmaker HS.
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RHS
RHS
This device purifies DI water into the high purity water vapor and supplies it to the process along with carrier gas.
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H2O2 Vaporizers (Peroxidizer)
H2O2 Vaporizers (Peroxidizer)
Peroxidizer provides a safe, reliable way to deliver high-concentration hydrogen peroxide gas into ALD, annealing, dry surface preparation and cleaning processes.
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H2O2 Vaporizers (Brute Peroxide)
H2O2 Vaporizers (Brute Peroxide)
BRUTE Peroxide provides a breakthrough method to deliver virtually water-free hydrogen peroxide (H2O2) gas into Atomic Layer Deposition (ALD) and Etch (ALE) processes.
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