Gasket

It is used for connection to VTR and shaped like Gasket. As it is put into VAC, it can make the gas pipe shorter and protect regulator, MFC and main parts from particles.

Defender

316L stainless steel fiber porous metal media is applicable to ultra high purity applications.

Utility Line and Bulk

Utility : As the product which is proper for high flow and high temperature of semiconductor utility line, it is better than Teflon which is susceptible to high pressure and high temperature.

Bulk : As it adopts the patented nickel porous metal media, it has the characteristics of high flow and low differential pressure.

IGS

Porous metal media product for high precision, high low 1.125&1.5” C-seal and W-seal is the product which is specific for the integrated gas system assembly.

Nickel

Nickel porous metal media can remove up to 99.9999999% of all particles even under the higher flow rates.

SUS

316L Stainless Steel porous metal media has the best filtration efficiency for Ultra High Purity Applications.