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IGS
IGS
IGS type product can control the flow without mass flow controller. In addition, if it is put and installed between other IGS part and base block, it can reduce the space.
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Diffuser
Diffuser
The particles may be dissipated due to the turbulent flow which happens when the atmospheric pressure changes inside the vacuum of load lock chamber. In this situation, this can prevent the dissipation of particles and reduce the “VENT” time.
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Gasket
Gasket
It is used for connection to VTR and shaped like Gasket. As it is put into VAC, it can make the gas pipe shorter and protect regulator, MFC and main parts from particles.
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Defender
Defender
316L stainless steel fiber porous metal media is applicable to ultra high purity applications.
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Utility Line and Bulk
Utility Line and Bulk
Utility : As the product which is proper for high flow and high temperature of semiconductor utility line, it is better than Teflon which is susceptible to high pressure and high temperature.
Bulk : As it adopts the patented nickel porous metal media, it has the characteristics of high flow and low differential pressure.
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IGS
IGS
Porous metal media product for high precision, high low 1.125&1.5” C-seal and W-seal is the product which is specific for the integrated gas system assembly.
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