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Products

Products

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IGS

IGS

IGS type product can control the flow without mass flow controller. In addition, if it is put and installed between other IGS part and base block, it can reduce the space.

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Diffuser

Diffuser

The particles may be dissipated due to the turbulent flow which happens when the atmospheric pressure changes inside the vacuum of load lock chamber. In this situation, this can prevent the dissipation of particles and reduce the “VENT” time.

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Gasket

Gasket

It is used for connection to VTR and shaped like Gasket. As it is put into VAC, it can make the gas pipe shorter and protect regulator, MFC and main parts from particles.

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Utility Line and Bulk

Utility Line and Bulk

Utility : As the product which is proper for high flow and high temperature of semiconductor utility line, it is better than Teflon which is susceptible to high pressure and high temperature.

Bulk : As it adopts the patented nickel porous metal media, it has the characteristics of high flow and low differential pressure.

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IGS

IGS

Porous metal media product for high precision, high low 1.125&1.5” C-seal and W-seal is the product which is specific for the integrated gas system assembly.

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