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AK series
AK series
반도체 Utility 라인 및 & 일반 산업용에 적합하게 제작 되었으며 LOK & NPT FITTING 으로 공급 가능
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AP series
AP series
최적의 Ultra High Purity Applications에 적합하게 제작 되었으며 BSGS, Gas Cabinet & VMB에 모두 사용 할수 있는 우수한 품질과 성능을 갖춤
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Sparger
Sparger
수많은 미세한 기공을 통하여 훨씬 넓은 기포의 표면적을 제공함으로써 더욱 완벽하고 신속하게 Gas를 Liquid내로 도입시킴
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Porous Media
Porous Media
효과적인 Particle filtration, Flow Restriction 및 Gas/Liquid Contacting 등 다양한 Application을 위하여 검증되고, 신뢰성이 높으며 수명이 긴 Media로써, 고객이 필요로 하는 Application에 최선의 Technical Support를 제공
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IGS
IGS
Mass flow controller 없이 flow를 control을 할수 있으며 reverse flow 를 막는 기능도 보유한 IGS TYPE 제품
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5140
5140
Mass flow controller 없이 flow를 control을 할수 있으며 reverse flow 를 막는 기능도 보유한 VCR TYPE 제품
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Diffuser
Diffuser
Load lock chamber 내의 진공에서 대기압 변환 과정에서 발생하는 Turbulent flow 에 의한 Particle의 흩어짐을 방지하며 "Vent" time을 줄일수 있음
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Gasket
Gasket
VCR 접속에 사용 되는 GASKET형태로서 VCR 내에 삽입되므로 gas system의 배관을 절약 할수 있으며 레귤레이터와 MFC 등 particle로 부터 주요 Parts를 보호 할 수 있음
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